eprintid: 17176
rev_number: 10
eprint_status: archive
userid: 2950
dir: disk0/00/01/71/76
datestamp: 2022-10-13 10:57:53
lastmod: 2022-10-13 10:57:54
status_changed: 2022-10-13 10:57:53
type: article
metadata_visibility: show
creators_name: Ba Hashwan, Saeed S
creators_name: Md Khir, Mohd Haris
creators_name: Al-Douri, Y
creators_name: Yousif, A
creators_name: Ramza, Harry
creators_name: Arjo, S
creators_id: saeedsb2013@gmail.com
creators_id: harisk@utp.edu.my
creators_id: yaldouri@yahoo.com
creators_id: hramza@uhamka.ac.id
creators_id: s.arjo@uhamka.ac.id
creators_orcid: 0000-0002-4126-8797
creators_orcid: 0000-0003-4346-510X
title: Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs
ispublished: pub
subjects: T1
subjects: TK
divisions: 20201
abstract: The analytical modeling, design, and simulation of micromachined MEMS resonator for ammonia gas detection
is presented in this paper. The MEMS resonator is designed to be vibrated electrostatically using interdigitated comb fingers. The demonstrated device is designed to be capable to carry micro-ring resonator and vibrated in-plane laterally to enhance the sensitivity of the gas detection.  This MEMS resonator working principle is based on the changes in the output signal wavelength due to the change in the effective refractive index introduced by the ammonia gas. The resonant frequency of the actuator and the pull-in voltage have been calculated theoretically and found to be 11.15 kHz and 79.7 V respectively. The design and simulation of the micromachined microresonator has been carried out using CoventorWare software. Furthermore, the mathematically modeled results were verified using the finite element analysis software and the result shows a good agreement within 1.06% error between the modeled and simulated frequencies where the modeled and the simulated frequencies are found to be 11.15 kHz and 11.27 kHz respectively.
date: 2021-07-13
date_type: published
publisher: IEEE
official_url: https://ieeexplore.ieee.org/document/9642706/authors#authors
full_text_status: public
publication: IEEE Explore
pagerange: 1-5
refereed: TRUE
issn: 978-1-7281-7667-3
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funders: Universiti Teknologi Petronas, Malaysia
projects: 10.13039/100016929-PETRONAS
citation:   Ba Hashwan, Saeed S dan Md Khir, Mohd Haris dan Al-Douri, Y dan Yousif, A dan Ramza, Harry dan Arjo, S  (2021) Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs.  IEEE Explore.  pp. 1-5.  ISSN 978-1-7281-7667-3     
document_url: http://repository.uhamka.ac.id/id/eprint/17176/1/Design_and_Simulation_of_MEMS_Electrostatic_Resonator_for_Ammonia_Gas_Detection_Based_on_SOIMUMPs.pdf