?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=Saeed+S&rft.aulast=Ba+Hashwan&rft.au=Ba+Hashwan%2C+Saeed+S&rft.title=IEEE+Explore&rft.pages=1-5&rft.date=13+July+2021&rft.issn=978-1-7281-7667-3&rft.atitle=Design+and+Simulation+of+MEMS+Electrostatic+Resonator+for+Ammonia+Gas+Detection+Based+on+SOIMUMPs&rft.genre=article